XYZ precision stage for optical lens dispenser on LED wafer

Optical lens dispenser is to use the surface tension of a glue drop to form the secondary optical lens directly on the LED wafer. It removes the process of mounting injected secondary optical lens on a separate LED chip for shortening the manufacturing process and cutting the cost.

ITEM  X axis (up) Yaxis(down) Z axis
Stroke Effective (mm) 150 150 50
Maximal (mm) 158 158 58
Resolution (um) 0.05 0.05 0.05
Straightness (um) <2 <1 <1
Flatness (um) <1 <2 <2
XYZ squareness (um) <2 <2
Repeatability (um) +/- 0.1 +/- 0.1 +/- 0.1
Accuracy (um)

(with laser calibration)

 < 1  < 1  < 1
Maximal speed (m/sec) 0.8 0.8 0.8
Maximal Acc.  (G) 2 2 2
  • X and Y axes are arranged to move separately, while the Z axis is stacked on the top X axis.
  • Moving magnet is employed so that there is no moving cable for this system.
  • Built-in cable chain and fully covered bellow to improve protection grade.
  • Ultra-low cogging force linear motors are employed.
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